• We understand
    E-Beam.
    Leading technology solutions
    for advanced electron-beam lithography
  • We understand
    E-Beam.
    Leading technology solutions
    for advanced electron-beam lithography
  • We understand
    E-Beam.
    Variable Shaped Beam systems with
    high throughput and excellent performance
  • We understand
    E-Beam.
    Flexible e-beam solutions for
    a huge variety of applications

Welcome to Vistec Electron Beam GmbH

As a long-standing equipment supplier, Vistec Electron Beam GmbH is providing leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and photonics.

Next Events

  • San Francisco, California

    EIPBN 2023

    The 66th meeting

    mehr
  • Dresden, Germany

    EMLC

    38th European Mask and Lithography Conference

    mehr
  • Dresden, Germany

    SiSax Day

    17th Silicon Saxony Day 2023

    mehr

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