COMPANY Variable Shaped Beam systems with high throughput and excellent performance

COMPANY Variable Shaped Beam systems with high throughput and excellent performance

About us

Vistec Electron Beam GmbH provides leading technology solutions for advanced electron-beam lithography. The Variable Shaped Beam systems are mainly utilized for semiconductor applications, advanced research as well as integrated optics.

News and Events

School excursion to Vistec

 

Today we hosted a group of students from the Carl Zeiss Gymnasium Jena. Our boss gave them a personal tour of the clean room and explained what variable shaped beam electron beam lithography is and what our lithography equipment is used…

 

In the T1 Poster-Session on Wednesday  "Micro/nanostructuring" Sep 18th, starting 4.30pm we'll present "Tuning the optical performance of photonic structures by optimized Variable Shaped Beam lithography"

Room Antigone 2

Check out the…